CARBOZEN Hybrid PVD System
This is a multi-phase composite coating system which meets any needs of
customers by using the ultimate combination of Linear Ion Source, UBM
Sputter, and FCVA Source.
Safety Lock for the equipment and the operator.
Operator can easily select between fully automatic and semi automatic
processes by using software program based MS windows.
work reports are automatically saved during coating processes.
Entire process of coatings can be stored as data
Advantages of LIS
Stable ionized energy during deposition process Formation of high quality
coating in large surface area Low cost operation Cleaning using Ar, O2, and